Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination

Chengcheng Chang; Xingchen Pan; Hua Tao; Cheng Liu; Jianqiang Zhu

doi:10.3788/AOS202040.1705001

Acta Optica Sinica, Volume. 40, Issue 17, 1705001(2020)

Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination

Chengcheng Chang^1,2,3, Xingchen Pan^1,2, Hua Tao^1,2, Cheng Liu^1,2、*, and Jianqiang Zhu^1,2

¹National Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²National Laboratory on High Power Laser and Physics, China Academy of Engineering Physics, Chinese Academy of Sciences, Shanghai 201800, China

³University of Chinese Academy of Science, Beijing 100049, China

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Chengcheng Chang, Xingchen Pan, Hua Tao, Cheng Liu, Jianqiang Zhu. Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination[J]. Acta Optica Sinica, 2020, 40(17): 1705001

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Paper Information

Category: Diffraction and Gratings

Received: May. 6, 2020

Accepted: May. 20, 2020

Published Online: Aug. 26, 2020

The Author Email: Cheng Liu (chengliu@siom.ac.cn)

DOI:10.3788/AOS202040.1705001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology