Lattice spacing of single crystal silicon is the fundamental of measurement of some physical constants. In this paper, the progress of the silicon lattice spacing measurement technique is introduced, including X-ray interferometer for direct measurement and lattice comparator for indirect measurement, and the key factor affecting the uncertainty of lattice spacing measurement are discussed. Due to the development of silicon lattice spacing measurement, the Si lattice spacing is used as a secondary realization of the definition of the metre at nanoscale, approved by BIPM. At last, the application of lattice measurement in metrology and research trends of the traceability system for nano dimension metrology based on the lattice are introduced.