One serious problem impairing semiconductor laser quality is the catastrophic optical damage (COD), and different cavity film have different devices COD. Ion beam assisted deposition (IBAD) can make the surface of substrate more cleanly, make the film more firmly and compactly, then decrease the loss of absorption and scatter. And making cavity films in a N2 atmosphere can can improve the threshold of COD. Using the 980 nm semiconductor, we found a improving COD from aging test in different technologies and different materials.