Chinese Optics Letters, Volume. 11, Issue 5, 053003(2013)
Experimental study of Fourier transform spectrometer based on MEMS micro-mirror
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238o. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.
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Jianjun Chen, Yong Zhu, Bo Liu, Wei Wei, Ning Wang, Jie Zhang, "Experimental study of Fourier transform spectrometer based on MEMS micro-mirror," Chin. Opt. Lett. 11, 053003 (2013)
Category: Spectroscopy
Received: Dec. 3, 2012
Accepted: Jan. 25, 2013
Published Online: Apr. 16, 2013
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