In selective laser melting (SLM) additive manufacturing, the high thermal stress induced by the high temperature gradient causes the deformation of the parts, which seriously affects the dimensional accuracy of SLM parts and has become the main obstacle to its engineering application. In the study, a large-scale thermo-mechanical indirect coupling finite element numerical model is developed to study the deformation distribution of the typical parts fabricated by SLM. The results indicate that the typical parts, such as the thin-walled part, incline-walled part, block, cylinder, and tri-prism, show an internal concave deformation. The maximum deformation occurs at the middle of the side of the parts. The simulated deformation results are in good agreement with the experimental data, and the error is less than ± 20 μm. The results provide the theoretical guidance for the deformation and accuracy control in SLM.