Opto-Electronic Engineering, Volume. 43, Issue 9, 56(2016)
Compensation Testing of Technological Spherical Surface for Convex Quadric Surface
In the testing of aspheric surface, the method of spherical compensation testing is always applied widely. Referring to the limitation of this method, the conditions are put forward which the aspheric surface has to meet. According to aberration theory and Rayleigh criterion, we could get the principles of applying the spherical compensation testing method to test convex quadric surface. And according to the compensation tests with the beam incidence at a distance, we can improve the method of spherical compensation testing. After accomplishing the manufacture of convex quadric surface mirror, the finial consequence shows that the theory and practices in this article can determine that spherical compensation testing can not be used to the test of this convex hyperboloidal surface mirror and δPV of the surface is 0.158 9λ which is better than λ/6 (λ=632.8 nm) under the use of combined compensation testing.
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CHEN Ze, HU Mingyong, ZHAO Qi, FAN Errong. Compensation Testing of Technological Spherical Surface for Convex Quadric Surface[J]. Opto-Electronic Engineering, 2016, 43(9): 56
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Received: Sep. 25, 2015
Accepted: --
Published Online: Dec. 9, 2016
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