Chinese Journal of Lasers, Volume. 45, Issue 1, 104003(2018)
High-Precision Laser Tracking Measurement Method and Experimental Study
In this paper, a high-precision laser tracking measurement method is proposed in order to meet the requirements of high measurement accuracy, large measurement range and real-time measurement in every filed of modern industry, which realizes precise tracking measurement of follow-up target. The laser tracking measurement system based on the four-quadrant detector can measure the incident laser spot offset that is relative to the center of the four-quadrant detector in real time. A fast response servo motor and the motion control card of programmable multi-axes controller (PMAC) are applied to build the closed-loop control system, which achieves high precision and fast laser tracking measurement. The experimental results show that the high-precision laser tracking measurement method proposed in this paper has good real-time performance and high measurement accuracy. When the tracking measurement of laser spot is within ±1000 μm away from the center of the four-quadrant detector, the error of spot offset is about 31.2 μm, and the average time of the laser spot returning the center of four-quadrant detector is 0.259 ms.
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Chen Hongfang, Sun Yanqiang, Wang Yawei, Shi Zhaoyao, Song Huixu. High-Precision Laser Tracking Measurement Method and Experimental Study[J]. Chinese Journal of Lasers, 2018, 45(1): 104003
Category: Measurement and metrology
Received: Aug. 29, 2017
Accepted: --
Published Online: Jan. 24, 2018
The Author Email: Hongfang Chen (hfchen@bjut.edu.cn)