Optics and Precision Engineering, Volume. 20, Issue 1, 165(2012)

Dynamic test of vibration for micro machined gyroscope based on high speed photography

YAO Feng-lin1,2、* and GAO Shi-qiao1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    As the common dynamic test method for Micro-electro-mechanical System (MEMS) is limited by its tiny feature sizes, this paper proposes a dynamic test system for micro machined gyroscope based on high speed photography after introducing three kinds of dynamic test methods. The hardware of the system and the function of the software are introduced. Then, it explains the key algorithm of the dynamic test system. It uses the Otsu algorithm to segment the image, and takes the region of Interest (ROI) and moment invariants to obtain the vibration curve. After spectrum analysis, the vibration characteristic of the micro machined gyroscope can be gotten. Experimental results indicate that the precision of the amplitude is 0.1 μm and the repeatability and consistency of the frequency domain is satisfactory. The dynamic test method shows higher precision, rapid speed, as well as strong anti-jamming and stabilization. It reduces the amount of calculation and improves the operation speed for the system.

    Tools

    Get Citation

    Copy Citation Text

    YAO Feng-lin, GAO Shi-qiao. Dynamic test of vibration for micro machined gyroscope based on high speed photography[J]. Optics and Precision Engineering, 2012, 20(1): 165

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 31, 2011

    Accepted: --

    Published Online: Feb. 14, 2012

    The Author Email: YAO Feng-lin (jasonyfl@163.com)

    DOI:10.3788/ope.20122001.0165

    Topics