Boron carbonitride (BCN) ternary compound films have adjustable composition ratio of atoms, and can show the corresponding material properties, so has broad application prospects in the field of mechanics, thermology, optic, electronics and so on. In this work, we report the synthesis of BCN films with various compositions on p-type Si (100) substrates via radio frequency (rf) magnetron sputtering. As N2 flow increases, nitrogen atoms can be incorporated into the turbostratic structure with a concentration of ~ 14 at.%. In addition to D and G bands, the N=N stretching morder to investigate the changes of structure and properties of BCN ternary system, Raman spectroscopy was used to systematically study the preparation of BCN ternary system with different nitrogen flow rates. The results show that, ode in Raman spectra becomes visible due to the excess of nitrogen incorporation.In addition, the disorder of the sample also led to an overall change in the Raman spectrum.