Acta Optica Sinica, Volume. 10, Issue 6, 502(1990)
Approaching on multiple-beam Moire deflectometry
In this paper a new method called multiple-beam Moire deflectometry, is presented. Using multiple-beam, we need not measure the tilt angle of Moire fringe, but record the position of the object when sharpness of the fringe is the best. The basic principles of this method are described. The grating pitch and the angle of wedge were measured by using this method, satisfactory experimental results were obtained.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Approaching on multiple-beam Moire deflectometry[J]. Acta Optica Sinica, 1990, 10(6): 502