Acta Optica Sinica, Volume. 10, Issue 6, 502(1990)

Approaching on multiple-beam Moire deflectometry

[in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    In this paper a new method called multiple-beam Moire deflectometry, is presented. Using multiple-beam, we need not measure the tilt angle of Moire fringe, but record the position of the object when sharpness of the fringe is the best. The basic principles of this method are described. The grating pitch and the angle of wedge were measured by using this method, satisfactory experimental results were obtained.

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    [in Chinese], [in Chinese], [in Chinese]. Approaching on multiple-beam Moire deflectometry[J]. Acta Optica Sinica, 1990, 10(6): 502

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    Paper Information

    Category: Physical Optics

    Received: Oct. 4, 1989

    Accepted: --

    Published Online: Nov. 12, 2007

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