Laser Technology, Volume. 48, Issue 5, 665(2024)

32×32 Si Geiger-mode laser focal plane detector

WANG Jiang1, WANG Ou1、*, LIU Xiangdong1, YUAN Li2, KE Zungui1, HAO Xin1, QIN Wenzhi1, and YANG Yunxiu1
Author Affiliations
  • 1Southwest Institute of Technical Physics, Chengdu 610041, China
  • 2502 Research Institute, the Fifth Research Institute, China Aerospace Science and Technology Group Co. Ltd., Beijing 100035, China
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    A 32×32 Geiger-mode silicon laser focal plane array detector was developed for the long-distance or weak-laser detection of the 3-D imaging system using the wavelength in range of 350 nm~1100 nm. This detector is mainly composed of silicon avalanche photodiode array, readout circuit chips, microlens arrays, semiconductor refrigerators, and pin-grid array shells. The silicon avalanche photodiode focal plane arrays, adopts the structure of pull through N+-Π1-P--Π2-P+ and works at the Geiger mode. The processing of thin photosensitive areas has been achieved through Si wafer back polishing and blind hole etching technology. An active-quenching-mode design was adopted to control the dead time of the circuit unit within 50 ns. An optimized time-to-digital converter circuit scheme with phase shift technology was used to achieve a time resolution within 2 ns while reducing the power consumption of the readout circuit chip. The results show that under the conditions of reverse bias voltage of 14 V and operating temperature of -40 ℃, the detector can achieve an average photon detection efficiency of 20.7% and an average dark counting rate of 0.59 kHz at the target wavelength of 850 nm, with a time resolution of 1 ns and an effective pixel rate better than 97%. This study provides a reference for the development of thin-type back-illuminated silicon-based laser focal plane detectors.

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    WANG Jiang, WANG Ou, LIU Xiangdong, YUAN Li, KE Zungui, HAO Xin, QIN Wenzhi, YANG Yunxiu. 32×32 Si Geiger-mode laser focal plane detector[J]. Laser Technology, 2024, 48(5): 665

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    Paper Information

    Category:

    Received: Aug. 29, 2023

    Accepted: Dec. 2, 2024

    Published Online: Dec. 2, 2024

    The Author Email: WANG Ou (eyiwang@163.com)

    DOI:10.7510/jgjs.issn.1001-3806.2024.05.008

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