To solve the bottleneck problem of deformation and cracks of laser metal deposition (LMD) parts and improve their mechanical properties, ultrasonic vibration is introduced to the LMD of titanium alloy processes to refine the grain size and to reduce residual stress based on its significant effect in the fields of casting, welding and laser cladding. So the paper applies ultrasonic vibration system to fabricate the samples and analyses its effect on its macroscopical appearances、microstructure and residual stress by experiments. The results show that the cladding layers thickness and the grain size change smaller, and also the reinforcement phase TiC in functionally graded materials samples is more uniform dispersion by metallographic photos. In addition, the residual stress is reduced, which shows that cavitation and mechanical effect of ultrasound break the solid crystal net connected by primary dendrite and refine the grain, and also the melt get supplement so as to the tensile stress is reduced. On the other hand, stirring acoustic stream in the molten pool make the reinforcement phase distribution uniform to reduce the solidification stress for different interphase solidification shrinkage stresses.