In order to study the path planning of nanosecond pulse laser in single microstructure, the temperature variation and ablation removal of micro-pits were simulated by using COMSOL Multiphysics finite element simulation software. The accuracy and efficiency of single-point pits are affected by the time and power of laser, and the prediction data model is established, the simulation results show that the pit radius r2∝ ln(t), the depth and time are linear, and the volume is quadratic distribution with time. Based on the simulation data model, the principle of multi-point strike planning is explored to find the optimal overlap ratio, and the feasibility is verified by experiments.