INFRARED, Volume. 45, Issue 1, 12(2024)

Preparation and Application of Three-Dimensional Micro-Tubes for 7.5 μm-Pitch Infrared Detectors

Ge-qing WANG1、*, Cong SHEN2, Xiao-yu FENG1, and Yi ZHANG1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    A fabrication process for three-dimensional micro-tubes was developed using existing readout circuit electrode growth equipment and direct-write photolithography system. In the preparation process, the three-dimensional micro-tubes were first prepared on the surface of the readout circuit. The indium bumps were grown on the HgCdTe chip, and then flip-chip bonding was used to achieve interconnections between the 1k×1k array HgCdTe chip with 7.5 m pitch and the readout circuit. The controllable parameters include metal growth angle, growth rate, thickness, and metal type, etc. It is found that the height of the three-dimensional micro-tubes with 7.5 m pitch prepared by this process can reach 3.8 m, the height non-uniformity is less than 3%, and it can withstand the pressure of 7.6×10-5 N. The application of the three-dimensional micro-tubes reduces the requirements for the flatness of HgCdTe chips and the precision of interconnection equipment in the flip-chip bonding process, significantly improving the yield of interconnected infrared detectors with 7.5 m pitch.

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    WANG Ge-qing, SHEN Cong, FENG Xiao-yu, ZHANG Yi. Preparation and Application of Three-Dimensional Micro-Tubes for 7.5 μm-Pitch Infrared Detectors[J]. INFRARED, 2024, 45(1): 12

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    Paper Information

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    Received: Jun. 22, 2023

    Accepted: --

    Published Online: May. 23, 2024

    The Author Email: Ge-qing WANG (wanggeqing@163.com)

    DOI:10.3969/j.issn.1672-8785.2024.01.002

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