Chinese Journal of Lasers, Volume. 36, Issue s2, 189(2009)

Nano-Displacement Measurement Method Based on Optical Lever

Tan Xingwen1,2、* and He Guotian3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The nano-displacement measurement based on the principle of optical lever is a contactlessly measurement technology,which has been extensively used in industry and scientific research fields. In this study,with the aim to solve some intractable issues in existing optical lever apparatus,such as low resolving power,low precision,and discommodious reading device,we present a multi-amplify and data auto-collecting system with real time technology based on optical lever and position sensitive detector (PSD) sensor,and design an apparatus to measure the linear expanding coefficient. According to the multi-amplify technology,the tiny displacement is amplified significantly,meanwhile,artificial error is eliminated based PSD sensor and LabVIEW data collecting and analysis platform. The experimental measurements indicate that the system repeat precision of brassiness,iron,aluminum and red copper is 7.5,7.2,7.6 and 8.1 nm.

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    Tan Xingwen, He Guotian. Nano-Displacement Measurement Method Based on Optical Lever[J]. Chinese Journal of Lasers, 2009, 36(s2): 189

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    Paper Information

    Category: Measurement and metrology

    Received: --

    Accepted: --

    Published Online: Dec. 30, 2009

    The Author Email: Tan Xingwen (tanxingw@swu.edu.cn)

    DOI:10.3788/cjl200936s2.0189

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