Chinese Journal of Lasers, Volume. 43, Issue 12, 1203002(2016)

Durable Silver Reflector Prepared by Magnetron Sputtering

Xu Xu1,2、*, He Wenyan1, Wang Changjun1, Wei Ming1, and Li Bincheng1,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The characteristics of Sub/NiCrNx/Ag/NiCrNx/SiNx/Air multilayer structure of silver reflector prepared by magnetron sputtering are studied and the influences of N2 on the spectrums of Ag thin film, dielectric protective layer and silver mirror are analyzed. The reasons to cause low reflectance of the silver films at short-wavelength region (400~500 nm) are investigated via depth profiling with X-ray photoelectron spectroscopy and transmission electron microscope. The influences of N2 proportion of Ar/N2 on the optical properties, surface topography and crystal structure of prepared single-layer silver films are investigated during sputtering deposition via spectrophotometry, scanning electron microscopy, and X-ray diffraction. Moreover, the reflectances of prepared-silver mirrors prepared by different gas flow ratios of Ar/N2 plasma are compared and the stoichiometric ratio of SiNx thin films is analyzed. Experimental results proves that, the stoichiometric ratio of SiNx thin films is ameliorated when the silver target is sputtered with the plasma of mixed argon and nitrogen. The reflectance of the prepared silver mirrors at 400 nm wavelength is improved from 71.7% to 79.3% as the N2/Ar gas flow ratio changed from 0 to 40%. Furthermore, the silver mirrors prepared by magnetron sputtering in Ar/N2 plasma present excellent corrosion resistance and environmental stability.

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    Xu Xu, He Wenyan, Wang Changjun, Wei Ming, Li Bincheng. Durable Silver Reflector Prepared by Magnetron Sputtering[J]. Chinese Journal of Lasers, 2016, 43(12): 1203002

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    Paper Information

    Category: materials and thin films

    Received: Aug. 17, 2016

    Accepted: --

    Published Online: Dec. 9, 2016

    The Author Email: Xu Xu (ioexuxu@163.com)

    DOI:10.3788/cjl201643.1203002

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