Chinese Journal of Lasers, Volume. 39, Issue 11, 1107001(2012)
Fabrication of 8-Channel Micro Integrated Filter in 2.0~2.4 μm by Combine Masks and Plating
Using the method to combine masks and plating the spacer layer of the Fabry-Perot filter, germanium and silicon oxide are selected as the high and low index coating materials, 8-channel integrated filter is designed and fabricated with an effective light-transmitting width of 450 μm separated by a block of 30 μm for each channel in the spectral regions of 2.0~2.4 μm. For each channel, the maximum transmittance is greater than 65%, the full width at half maximum (FWHM) is 8~13 nm, as well as, the relative bandwidth is between 0.33%~0.65%.
Get Citation
Copy Citation Text
Luo Haihan, Li Yaopeng, Cai Qingyuan, Liu Dingquan. Fabrication of 8-Channel Micro Integrated Filter in 2.0~2.4 μm by Combine Masks and Plating[J]. Chinese Journal of Lasers, 2012, 39(11): 1107001
Category: materials and thin films
Received: May. 14, 2012
Accepted: --
Published Online: Oct. 18, 2012
The Author Email: Haihan Luo (jxndlhh@sina.com)