Opto-Electronic Engineering, Volume. 35, Issue 11, 139(2008)

Investigation of Optical Components Polished with Polyurethane Pad

LI Ya-guo1、*, WANG Jian1, XU Qiao1, YANG Wei2, ZHOU Zhi-xin1, and GUO Yin-biao2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    The effect of high speed polishing process was investigated,which was applied to polish large optical flatware. Material removal rate as well as surface roughness was measured,which was used to evaluate the quality of optical component. The effect of pressure and spindle speed on material removal rate was researched,which was up to 10um/h in our experiments. The results of experiments coincided with Preston formula. Moreover,the surface form of optical components polished by high speed polishing is ~1.0λ(λ=632.8 nm). Last,surface roughness induced by high speed polishing with different size polishing agents (300 and 500 mesh size) was also observed. Our results show that the surface roughness is proportional to the size of polishing agent which deceases with the time of use.

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    LI Ya-guo, WANG Jian, XU Qiao, YANG Wei, ZHOU Zhi-xin, GUO Yin-biao. Investigation of Optical Components Polished with Polyurethane Pad[J]. Opto-Electronic Engineering, 2008, 35(11): 139

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    Paper Information

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    Received: Mar. 10, 2008

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email: Ya-guo LI (riyg@163.com)

    DOI:

    CSTR:32186.14.

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