This paper examines the critical aspects of metallized through-hole quality in low-temperature co-fired ceramic (LTCC) components, focusing on the hole opening and filling processes. The quality of hole opening is fundamental to ensuring the subsequent filling process. The study analyzes the performance of CO₂ laser drilling on the white raw material belt of 30-micron-thick LTCC, addressing issues such as local perforation and residual raw ceramic material in the annular drilling mode. A universal and efficient program design method for laser annular drilling is proposed, which significantly improves the quality of apertures larger than 100 μm through process enhancement and design optimization.