Chinese Journal of Lasers, Volume. 21, Issue 12, 945(1994)
Silicon Nitride Binary-Phase Optical Elements with the Function of Splitting and Focussing
Having both functions of beam splitting and focussing a home designed binary-optical beam splitter combined with a two-dimensional Dammann grating and a Fresnel zone plate is reported. This element is achieved by means of amorphous silicon nitride thin films. The split arrays are 3×3 and the focus length is 18 cm. The relative distribution error of the split beam intensity is less than 5%.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Silicon Nitride Binary-Phase Optical Elements with the Function of Splitting and Focussing[J]. Chinese Journal of Lasers, 1994, 21(12): 945