Optics and Precision Engineering, Volume. 21, Issue 5, 1160(2013)
Measurement and fabrication error analysis of FZP core mould
To obtain the surface topography of micro core mould for a Fresnel micro-lens, scanning white light interferometry was used to test its surface relief structure. Then, the surface micro topography of the Fresnel micro-lens was reconstructed. With obtained topography data and introduced amplitude parameters, the fabrication errors on transverse line width , longitudinal systematic etching depth and random etch depth of the Fresnel Zone Plate(FZP) were calculated, respectively. By surface height distribution parameters, such as skewness and kurtosis, the micro mandrel surface errors and quantitative defect information were obtained. Experimental results show that scanning white light interferometry can characterize the surface topography of micro core mould for Fresnel micro-lens quantitatively and exactly, and the method proposed has practical significance for a non-destructive testing and evaluation for three-dimensional surface morphology of micro-optics.
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ZOU Wen-dong, LIU Jia, WANG Xing-xing, JIANG Mao-qing, GONG Yong-qing. Measurement and fabrication error analysis of FZP core mould[J]. Optics and Precision Engineering, 2013, 21(5): 1160
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Received: Nov. 12, 2012
Accepted: --
Published Online: May. 31, 2013
The Author Email: ZOU Wen-dong (18979106189@189.cn)