Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 262(2025)

Design of in Band Transverse Mode Suppression Structure with Bragg Reflector Resonator

LI Lei1,2, SHUAI Yao2,3, LI Jinye1,2, FAN Wei3, WU Dahao2,3, LUO Wenbo2,3, WU Chuangui2,3, and ZHANG Wanli2,3
Author Affiliations
  • 1School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
  • 2Chongqing Microelectronics Industry Technology Research Institute, University of Electronic Science and Technology of China, Chongqing 401332, China
  • 3School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
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    Based on X-cut lithium niobate resonator with Bragg reflector structure (SMR), the effects of in-plane rotation angle and Al electrode thickness on electromechanical coupling coefficient(K2), phase velocity, and impedance ratio were simulated and calculated via finite element (FEM) simulation. We constructed a three-dimensional finite element (3D FEM) structure to investigate the relationship between transverse modes and half wavelength within the resonator band and compared the suppression effect of transverse modes between two types of piston structures. However, the effect was not significant. Then three weighted resonator structures were proposed, namely weighted without dummy fingers, weighted with dummy fingers, and weighted with hammers. Subsequently, the performance of ordinary resonators was compared with three types of weighted resonators via experiments. The results show that the electromechanical coupling coefficient of the three weighted resonators exceeds 15%, and the impedance ratio is approximately 60 dB, which has a significant inhibitory effect on the transverse modes within the band.

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    LI Lei, SHUAI Yao, LI Jinye, FAN Wei, WU Dahao, LUO Wenbo, WU Chuangui, ZHANG Wanli. Design of in Band Transverse Mode Suppression Structure with Bragg Reflector Resonator[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 262

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    Paper Information

    Received: Dec. 23, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.011

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