Chinese Journal of Lasers, Volume. 24, Issue 1, 35(1997)
Ion Beam Etching of Binary Optics Microlens Arrays and the Test of Diffraction Efficiency
A binary optics microlens array (BM) was fabricated by using ion beam teching. The real-time test of etching depth in vacuum enviroment was performed. A noval method of measuring the BM diffraction efficiency was presented.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Ion Beam Etching of Binary Optics Microlens Arrays and the Test of Diffraction Efficiency[J]. Chinese Journal of Lasers, 1997, 24(1): 35
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