Aiming at the requirements of three-dimensional shape measurement of profiled surfaces with the deep hole feature, a method based on CAD (Computer Aided Design) digital model extraction information for self-adaptability measurement and a trajectory planning measurement method based on normal precision control are proposed. The simulation analysis of the displacement-time, speed-time and acceleration-time curves of a robot verifies the smoothness of the trajectory curve obtained by the high-order polynomial interpolation method. The positional deviation and angular deviation of TCP (Tool Centror Point) in the process of shape measurement are verified by the shape measurement experiment based on the normal precision control. The position deviation is within 0.092 mm and the angular deviation is within 0.19°, which proves the feasibility of the proposed method.