International Journal of Extreme Manufacturing, Volume. 7, Issue 1, 15101(2025)

Laser-induced thermo-compression bonding for Cu–Au heterogeneous nanojoining

Wan Hui, Shu Yu, Chen Shuo, Cao Hao, Zhou Shengjun, Liu Sheng, and Gui Chengqun

Surface tension-induced shrinkage of heterogeneously bonded interfaces is a key factor in limiting the performance of nanostructures. Herein, we demonstrate a laser-induced thermo-compression bonding technology to suppress surface tension-induced shrinkage of Cu–Au bonded interface. A focused laser beam is used to apply localized heating and scattering force to the exposed Cu nanowire. The laser-induced scattering force and the heating can be adjusted by regulating the exposure intensity. When the ratio of scattering forces to the gravity of the exposed nanowire reaches 3.6 × 103, the molten Cu nanowire is compressed into flattened shape rather than shrinking into nanosphere by the surface tension. As a result, the Cu–Au bonding interface is broadened fourfold by the scattering force, leading to a reduction in contact resistance of approximately 56%. This noncontact thermo-compression bonding technology provides significant possibilities for the interconnect packaging and integration of nanodevices.

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Wan Hui, Shu Yu, Chen Shuo, Cao Hao, Zhou Shengjun, Liu Sheng, Gui Chengqun. Laser-induced thermo-compression bonding for Cu–Au heterogeneous nanojoining[J]. International Journal of Extreme Manufacturing, 2025, 7(1): 15101

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Paper Information

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Received: Nov. 27, 2023

Accepted: Apr. 17, 2025

Published Online: Apr. 17, 2025

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DOI:10.1088/2631-7990/ad8736

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