Chinese Optics Letters, Volume. 13, Issue s1, S12203(2015)
SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser
Silicon carbide (SiC) is a wide bandgap semiconductor which exhibits outstanding mechanical, chemical properties, and potential for a wide range of applications. Laser technology is being established as an -indispensable powerful tool to induce structural or morphological modifications on hard brittle materials. SiC (6H-SiC wafer) is irradiated by nanosecond pulsed Nd:YAG laser to evaluate microstructure and mechanical properties of irradiation areas. Raman spectroscopy analysis reveals that irradiations produce homonuclear Si-Si bonds and disordered phase of crystalline SiC. Crystal structure changes are observed as a consequence of laser-induced melting and resolidification. Hardness in the irradiation area exhibits a significant decrease. The formation of silicon film facilitates material removal rate, surface electrical conductivity, and ceramics conjunction.
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Zhiyu Zhang, Yang Xu, Binzhi Zhang, "SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser," Chin. Opt. Lett. 13, S12203 (2015)
Category: Optical Design and Fabrication
Received: Apr. 7, 2014
Accepted: Jul. 16, 2014
Published Online: Jan. 27, 2015
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