Semiconductor Optoelectronics, Volume. 45, Issue 1, 25(2024)

DBR-Enhanced 850nm GaAs/AlGaAs Uni-Traveling-Carrier Photodiode

WANG Jian1, DOU Zhipeng1, LI Guanghao2, HUANG Xiaofeng2, YU Qian1, HAO Zhibiao1, XIONG Bing1, SUN Changzheng1, HAN Yanjun1, WANG Lai1, LI Hongtao1, GAN Lin1, and LUO Yi1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    GaAs/AlGaAs surface-illuminated uni-traveling carrier (UTC) photodiodes (PDs) are critical devices for short-range optical links. However, a conflict exists between bandwidth and responsiveness. We report a GaAs/AlGaAs UTC-PD enhanced by a distributed Bragg reflector (DBR) that consists of 20 cycles of high/low Al component AlxGa1-xAs and has a reflectance >0.9 in the wavelength range of 830~870nm. The thickness of the GaAs absorption layer is reduced to 1040nm, which compromises the light absorption of the PD and transit time of photogenerated electrons. The UTC-PD device is fabricated with a double-mesas structure, polymer planarization, and a coplanar waveguide electrode. The device has a -3dB bandwidth of 19.26GHz, a responsivity of 0.4926A/W at a wavelength of 850nm, and a bias of -2V.

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    WANG Jian, DOU Zhipeng, LI Guanghao, HUANG Xiaofeng, YU Qian, HAO Zhibiao, XIONG Bing, SUN Changzheng, HAN Yanjun, WANG Lai, LI Hongtao, GAN Lin, LUO Yi. DBR-Enhanced 850nm GaAs/AlGaAs Uni-Traveling-Carrier Photodiode[J]. Semiconductor Optoelectronics, 2024, 45(1): 25

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    Paper Information

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    Received: Oct. 24, 2023

    Accepted: --

    Published Online: Jun. 25, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023102402

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