A low jitter two channel discharge pumped excimer laser

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 13, Issue 5, 270(1986)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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A two channel fast discharge pumped excimer laser was designed. The jitter time bettween two output laser beams was measured as ±1 ns at the operation pressure of 1 atm,and ±5 ns at 2 atm, respectively. The output energy of each channel was 80-100 mJ, the maximum was approximatly 150 mJ.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A low jitter two channel discharge pumped excimer laser[J]. Chinese Journal of Lasers, 1986, 13(5): 270

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Paper Information

Category: laser devices and laser physics

Received: Feb. 19, 1985

Accepted: --

Published Online: Aug. 2, 2012

The Author Email:

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology