Journal of Optoelectronics · Laser, Volume. 36, Issue 5, 456(2025)

Analysis of the impact of grating fabrication and assembly errors on the micro-displacement detection based on double-layer grating Talbot effect

ZHANG Xiaoyu1,2, WANG Ce1,2, JIN Li1,2、*, XIE Kunyang2,3, ZHANG Minjuan2,4, and LI Mengwei2
Author Affiliations
  • 1School of Instrument and Electronics,North University of China,Taiyuan, Shanxi 030051,China
  • 2Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan, Shanxi, 030051 China
  • 3School of Innovation and Entrepreneurship,North University of China, Taiyuan, Shanxi 030051, China
  • 4School of Information and Communication Engineering, North University of China, Taiyuan, Shanxi 030051, China
  • show less

    The micro-dsplacement sensor based on double-layer grating Talbot effect has the advantages of high resolution and anti-electromagnetic interference,however,its accuracy is affected by the fabrication and assembly errors of gratings. In this paper,COMSOL software is employed to simulate and analyze the influence of the fabrication errors (including the line width,thickness and duty cycle of the grating) and assembly errors (including the included angle of layers,included angle of grid lines and grating spacing of double-layer grating) of the gratings.The final results shows that the allowable error of the grating period is less than ±0.1 μm,the influence of the thickness of the grating on the diffraction efficiency is negligible,and the optimal value of the duty cycle is 0.5.In addition,the included angle of layers,included angle of grid lines of double-layer grating also have a significant impact on the diffraction efficiency,the allowable errors of included angle of layers,included angle of grid lines and grating spacing of double-layer grating are less than 1°,0.1° and ±0.1 μm,respectively.The analysis will be helpful to compensate for various types of errors in the future,thereby ensuring high-precision micro-displacement detection system based on grating Talbot effect.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Xiaoyu, WANG Ce, JIN Li, XIE Kunyang, ZHANG Minjuan, LI Mengwei. Analysis of the impact of grating fabrication and assembly errors on the micro-displacement detection based on double-layer grating Talbot effect[J]. Journal of Optoelectronics · Laser, 2025, 36(5): 456

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Dec. 28, 2023

    Accepted: Apr. 24, 2025

    Published Online: Apr. 24, 2025

    The Author Email: JIN Li (515708987@qq.com)

    DOI:10.16136/j.joel.2025.05.0661

    Topics