In this paper, a high performance temperature compensation thin film bulk acoustic resonator (TC-FBAR) filter is developed. The COMSOL software is used to model and simulate the resonator with high performance thermal compensation structure, and the model is modified on the basis of the conventional one-dimensional Mason equivalent circuit model, and then the filter is simulated and optimized in ADS, finally, the TC-FBAR filter with stepped structure is realized. The temperature compensation FBAR filter chip is fabricated by using the cavity structure. On the basis of the conventional TC-FBAR, the air bridge and convex structure are prepared, thus the high performance TC-FBAR filter with dual air bridge structure is obtained. The test results show that the center frequency of the filter is 2.43 GHz, the minimum insertion loss is 1.02 dB, 1 dB bandwidth is 70.5 MHz, and frequency temperature coefficient is 1.82×10-6/℃.