Chinese Journal of Lasers, Volume. 17, Issue 10, 615(1990)
Effect of laser wavelength on laser crystallization mechanism of a-Si SOI
Two lasers with different wavelengths-the argon laser and CO2 laser have been used for laser crystallization of a-Si SOI. Using the argon laser we have a direct heating laser crystallization, while for CO2 laser we have an indirect heating laser crystallization. The crystallization mechanisms for both cases are different and different topographies are obtained.
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[in Chinese], [in Chinese], [in Chinese]. Effect of laser wavelength on laser crystallization mechanism of a-Si SOI[J]. Chinese Journal of Lasers, 1990, 17(10): 615
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