Indium tin oxide (ITO)/Silver(Ag)/ITO multilayer composite films were sputtered by DC magnetron sputtering. The effect of sputtering temperature on the structure and photoelectrical properties of ITO/Ag/ITO multilayer composite films was systematically studied. ITO (m(In2O3)∶m(SnO2)=9∶1; 60 mm diameter) and Ag (purity 99.999%; 60 mm diameter) targets were layered to deposit ITO and Ag films sequentially on a sodium-calcium glass substrate. The film was characterized and analyzed by X-ray diffractor, SEM, UV spectrophotometer, and a four-probe test system. The results show that the sputtering temperature has a significant effect on the morphology and structure of the film. When the sputtering temperature of Ag film and ITO film is 120 ℃, the surface morphology of the film changes from spherical to prism. The square resistance of the film is 3.68 Ω/Sq, the transmittance is 88.98% at 488 nm, and the quality factor is 0.03 Ω-1. Compared with other sputtering temperatures, the visible light transmittance and electrical conductivity of the films are greatly improved. ITO/Ag/ITO multilayer composite film is an ideal transparent conductive material for large-size touch panels due to its excellent photoelectric performance.