For laser cutting equipment that uses galvanometers for processing, in order to improve cutting accuracy, the galvanometer must be calibrated. The common calibration method is using galvanometers to cut a matrix of fixed patterns (usually called mark point), and then use the camera to read the specific position of each pattern in the matrix one by one, and calculate the correction grid based on this and implement the correction. Circle and cross are two commonly used mark point shapes. In this paper, a comparative experiment was carried out on the influence of the two kinds of mark points on the calibration accuracy of the galvanometer. The results show that the accuracy of the circular mark point calibration is better. When the standard deviation of the repeated positioning of the platform is about 1 μm, the average error of the galvanometer after the circular mark point calibration is 1.99 μm, and the standard deviation is 1.09 μm; the average error of the galvanometer after the cross mark point calibration is 2.95 μm, the standard deviation is 1.60μm.