To study the effects of the ultrasonic vibration on femtosecond laser micromachining, an ultrasonic aided device is designed, and the laser micromachining experiments of fiber optic materials are carried out. The effects of the ultrasonic vibration with different powers on surface quality and the drilling depth are investigated. And the mechanism of the ultrasonic vibration aided laser machining is analyzed. After introducing the ultrasonic vibration, the inner surface of the ablated trench is cleaner, the residue debris on surface is significantly reduced, and the drilling depth is increased. When the ultrasonic power is 30 W, the taper of the hole is reduced from 7.34° to 4.17°. The results show that, ultrasonic vibrations can effectively improve the surface quality of materials, increase the depth of the drilled hole, improve the efficiency of the femtosecond laser processing. It is also confirmed that, the ultrasonic vibration has significant effect on improving femtosecond laser processing performance.