Journal of Infrared and Millimeter Waves, Volume. 42, Issue 5, 574(2023)

Research on InAs/GaSb type-II superlattice dual-band long-/long-wavelength infrared photodetector

Ming LIU1、*, Cong-Ya YOU1, Jing-Feng LI1, Fa-Ran CHANG2, Tao WEN1, Nong LI2, Peng ZHOU1, Yu CHENG1, and Guo-Wei WANG2、**
Author Affiliations
  • 1North China Research Institute of Electro-optics,Beijing 100015,China
  • 2The State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Science,Beijing 100083,China
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    The development of type II superlattice dual-band long-/long-wavelength infrared focal plane photodetector is reported. Through the design of energy band structure and molecular beam epitaxial technology, dual-band long-/long-wavelength superlattice epitaxial material with good surface quality has been obtained. The 320×256 dual-band long-/long-wavelength InAs/GaSb superlattice focal plane photodetector with pixel center distance of 30 μm was prepared by breaking through the key technologies of low dark current passivation and low damage dry etching. The detector chip is interconnected with a dual color readout circuit, packaged in a Dewar package, and coupled to a refrigerator to form a detector assembly. The dual-band 50% cut-off wavelengths of the photodetector are 7.7 μm (band 1) and 10.0 μm (band 2), respectively. The average peak detectivity of band 1 reached 8.21×1010 cmW-1Hz1/2, and NETD achieved 28.8 mK. The average peak detectivity of band 2 reached 6.15×1010 cmW-1Hz1/2, and the NETD was 37.8 mK. Clear imaging of both colors has been achieved, demonstrating the realization of long-/long-wavelength dual-band photodetection.

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    Ming LIU, Cong-Ya YOU, Jing-Feng LI, Fa-Ran CHANG, Tao WEN, Nong LI, Peng ZHOU, Yu CHENG, Guo-Wei WANG. Research on InAs/GaSb type-II superlattice dual-band long-/long-wavelength infrared photodetector[J]. Journal of Infrared and Millimeter Waves, 2023, 42(5): 574

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    Paper Information

    Category: Research Articles

    Received: Mar. 22, 2023

    Accepted: --

    Published Online: Aug. 30, 2023

    The Author Email: Ming LIU (kaka_851001@163.com), Guo-Wei WANG (wangguowei@semi.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2023.05.002

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