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Chinese Journal of Lasers, Volume. 12, Issue 8, 488(1985)

Over-voltage breakdown and measurement equipment for the excimer laser using fast discharge excitation

Xia Kangmin, Fu Shufen, and Chen Jianwen
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    This paper presents the experimental results on. measuring the discharge voltage of an cxcimcr laser using a voltage divider. Also discussed are various factors impairing the performance of the measurement equipment and the ways for limination of over-voltage breakdown and the variation law.

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    Xia Kangmin, Fu Shufen, Chen Jianwen. Over-voltage breakdown and measurement equipment for the excimer laser using fast discharge excitation[J]. Chinese Journal of Lasers, 1985, 12(8): 488

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    Paper Information

    Category: laser devices and laser physics

    Received: Jun. 15, 1984

    Accepted: --

    Published Online: Nov. 6, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology