Lead Zirconate Titanate Thin Films Produced by Pulsed Excimer Laser Deposition

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 21, Issue 8, 631(1994)

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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It is a new technology to combine the laser with the thin film deposition. Lead zirconate titanate (PZT) films were successfully deposited on the Si(100) and SiO2/Si substrates by pulsed eximer laser (λ=193 nm) deposition at 5 Hz, 4 J/cm2 and then annealed by RTA at various conditions.The structure, composition and thickness of the films were measured by XRD, RBS and ASR respectively.

Keywords

ferroelectric thin film pulsed laser deposition(PLD)PZT

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Lead Zirconate Titanate Thin Films Produced by Pulsed Excimer Laser Deposition[J]. Chinese Journal of Lasers, 1994, 21(8): 631

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Paper Information

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Received: Dec. 7, 1993

Accepted: --

Published Online: Aug. 17, 2007

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology