Opto-Electronic Engineering, Volume. 30, Issue 6, 32(2003)

An infrared temperature-measuring system for a small high-temperature region on semiconductor substrate

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An infrared temperature-measuring system for a small high-temperature region on semiconductor substrate[J]. Opto-Electronic Engineering, 2003, 30(6): 32

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    Received: Feb. 25, 2003

    Accepted: --

    Published Online: Nov. 14, 2007

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