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Acta Optica Sinica, Volume. 18, Issue 11, 1523(1998)

Transmission of Refractive Microlens Array by Reactive Ion Beam Etching

[in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Transmission of Refractive Microlens Array by Reactive Ion Beam Etching[J]. Acta Optica Sinica, 1998, 18(11): 1523

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    Paper Information

    Category: Optical Devices

    Received: Aug. 28, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology