OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 22, Issue 5, 136(2024)

Preparation and Study of Self-Assembled Nanostructured Arrays Photodetector

ZHANG Mo-han, SHUI Fu-rong, WEI Shu-juan, QIN Zu-bin, SUN Tang-you, and LIAO Qing
Author Affiliations
  • Guangxi Key Laboratory of Precision Navigation Technology and Application,Guilin University of Electronic Technology,Guilin 541004,China
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    In order to avoid the time-consuming,expensive equipment and complicated steps of traditional lithography and to solve the neck-pinching technical problems in the field of microelectronics fabrication,liquid-surface self-assembled polystyrene(PS)nanosphere is utilized to prepare nanostructured arrays in this paper. Low-cost,large-area,size-controllable nanostructured arrays on n-type silicon substrates are successfully prepared and successfully employed to photodetector. It is shown that the introduction of nanostructures can effectively improve the anti-reflective property of silicon surface,and the reflectivity is reduced by up to about 96% compared with that of planar silicon. The light/dark current ratio of the nanostructured device approximately reached one order of magnitude. At +5 V bias,the responsivity of the nanostructured photodetector is improved by 10.1-fold and 3.7-fold compared with that of the planar one at the wavelengths of 365 nm and 405 nm,respectively. At +5 V bias,the external quantum efficiency(EQE)of the nanostructured photodetector is 10.1 times higher than that of the planar one at 365 nm and 3.7 times higher at 405 nm. This provides a low-cost,efficient,reliable and simple way to prepare high-performance nanostructured optoelectronic devices.

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    ZHANG Mo-han, SHUI Fu-rong, WEI Shu-juan, QIN Zu-bin, SUN Tang-you, LIAO Qing. Preparation and Study of Self-Assembled Nanostructured Arrays Photodetector[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2024, 22(5): 136

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    Paper Information

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    Received: Jan. 29, 2024

    Accepted: Jan. 21, 2025

    Published Online: Jan. 21, 2025

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    DOI:

    CSTR:32186.14.

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