Chinese Journal of Lasers, Volume. 39, Issue s1, 103007(2012)
Pulsed Laser Deposition Technology for High Performance Diamond-Like Carbon Films on Infrared Window
Diamond-like carbon (DLC) film characteries high transmittance in wide spectrum, high hardness, good heat exchange and stability. It can be used as perfect anti-reflective and protective film for infrared windows. However, DLC films in existence can not be used under bad conditions, such as flying in high mach number or steering in ocean. Compared to other deposition methods, pulsed laser deposition (PLD) has many merits. Principle and characters of PLD to deposite DLC film were introduced. Problems and key technology for engineering application were also analyzed. DLC films were deposited by PLD. The nano-hardness was up to 44 GPa, inner-stress is only 0.8 GPa and adhesion of critical load is 59.1 mN. Average transmittance of ZnS, Si and Ge windows coated by DLC films and common anti-reflective films reached 82%~91%. Uniform DLC film was deposited on 150 mm substrate and thickness asymmetry no larger than 2%. The windows coated by DLC films passed military standard tests and realized optical engineering application.
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Cheng Yong, Wang Shuyun, Guo Yanlong, Huang Guojun, Lu Yimin, Wan Qiang, Liu Xu. Pulsed Laser Deposition Technology for High Performance Diamond-Like Carbon Films on Infrared Window[J]. Chinese Journal of Lasers, 2012, 39(s1): 103007
Category: laser manufacturing
Received: Feb. 21, 2012
Accepted: --
Published Online: Jun. 25, 2012
The Author Email: Yong Cheng (gdyjs@263.net)