APPLIED LASER, Volume. 22, Issue 4, 405(2002)
Etching of ZrO2 ceramic with UV laser ablation
The experiment of micro-ablation of ZiO_2 ceramic by KrF excimer laser is described in this paper. The relationship between etching depth and laser pulse number, and the morphology of etching groove are investigated. The micro-holes with 40(m diameter and 25(m deepness are obtained. The results give the fundamental data for KrF laser ceramic processing.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Etching of ZrO2 ceramic with UV laser ablation[J]. APPLIED LASER, 2002, 22(4): 405
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