Chinese Journal of Lasers, Volume. 38, Issue 10, 1008001(2011)
Two-Wavelength Sinusoidal Phase-Modulating Interferometer Insensitive to Intensity Modulation
In a two-wavelength laser-diode (LD) sinusoidal phase modulating (SPM) interferometer, wavelength of LD is modulated by variation of its injection current (IC). However, the IC modulation results in both wavelength modulation and intensity modulation, which will cause a measurement error. A novel two-wavelength LD SPM interferometer is proposed. In order to eliminate the error caused by intensity modulation, phase of interference signal is calculated accurately by solving linear equations obtained with the interference signal processing. With the proposed method, measurement error decreases from 6 to 1 μm. Moreover, the proposed interferometer is combined with linear wavelength scanning interferometer (WSI) for absolute distance measurement. Experimental result indicates that an absolute distance measurement repeatability of 1 μm can be achieved over a range of 60 to 280 mm.
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Wang Bofan, Li Zhongliang, Wang Xiangzhao, Bu Yang. Two-Wavelength Sinusoidal Phase-Modulating Interferometer Insensitive to Intensity Modulation[J]. Chinese Journal of Lasers, 2011, 38(10): 1008001
Category: measurement and metrology
Received: May. 30, 2011
Accepted: --
Published Online: Sep. 28, 2011
The Author Email: Bofan Wang (siom_wbf@163.com)