Semiconductor Optoelectronics, Volume. 46, Issue 2, 209(2025)
Theoretical Analysis on Signal-to-Noise Ratio of Multiplication Layer in EBCMOS
Based on photon-transport theory and the theory of electron-semiconductor interactions, a model for the formation mechanism of gain noise caused by secondary electron fluctuations in the electron-multiplying layer of electron-bombarded complementary metal-oxide-semiconductor (EBCMOS) devices is established. By performing a Monte Carlo simulation, the signal-to-noise ratio (SNR) of secondary electrons is calculated to analyze the effect of system parameters, including incident electron energy, passivation-layer type and thickness, electron-multiplying layer thickness, and doping concentration, on gain noise. The results indicate that by using Al2O3 as the passivation-layer material and implementing a series of measures such as reducing the passivation-layer thickness, doping concentration, electron-multiplying layer thickness, and operating temperature, the SNR of the electron-multiplying layer can be effectively improved to 75.35 dB. The findings of this study provide theoretical guidance for preparing the electron-multiplying layer in EBCMOS devices.
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WANG Chongxiao, CHEN Weijun, SONG De, LIANG Rongxuan, YUE Jipeng, XIA Haoran, LIU Mingshan. Theoretical Analysis on Signal-to-Noise Ratio of Multiplication Layer in EBCMOS[J]. Semiconductor Optoelectronics, 2025, 46(2): 209
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Received: Dec. 24, 2024
Accepted: Sep. 18, 2025
Published Online: Sep. 18, 2025
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