Semiconductor Optoelectronics, Volume. 46, Issue 2, 209(2025)

Theoretical Analysis on Signal-to-Noise Ratio of Multiplication Layer in EBCMOS

WANG Chongxiao, CHEN Weijun, SONG De, LIANG Rongxuan, YUE Jipeng, XIA Haoran, and LIU Mingshan
Author Affiliations
  • School of Physics, Changchun University of Science and Technology, Changchun 130022, CHN
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    Based on photon-transport theory and the theory of electron-semiconductor interactions, a model for the formation mechanism of gain noise caused by secondary electron fluctuations in the electron-multiplying layer of electron-bombarded complementary metal-oxide-semiconductor (EBCMOS) devices is established. By performing a Monte Carlo simulation, the signal-to-noise ratio (SNR) of secondary electrons is calculated to analyze the effect of system parameters, including incident electron energy, passivation-layer type and thickness, electron-multiplying layer thickness, and doping concentration, on gain noise. The results indicate that by using Al2O3 as the passivation-layer material and implementing a series of measures such as reducing the passivation-layer thickness, doping concentration, electron-multiplying layer thickness, and operating temperature, the SNR of the electron-multiplying layer can be effectively improved to 75.35 dB. The findings of this study provide theoretical guidance for preparing the electron-multiplying layer in EBCMOS devices.

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    WANG Chongxiao, CHEN Weijun, SONG De, LIANG Rongxuan, YUE Jipeng, XIA Haoran, LIU Mingshan. Theoretical Analysis on Signal-to-Noise Ratio of Multiplication Layer in EBCMOS[J]. Semiconductor Optoelectronics, 2025, 46(2): 209

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    Paper Information

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    Received: Dec. 24, 2024

    Accepted: Sep. 18, 2025

    Published Online: Sep. 18, 2025

    The Author Email:

    DOI:10.16818/j.issn1001-5868.20241224001

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