Chinese Journal of Lasers, Volume. 33, Issue suppl, 415(2006)

Applications of Femtosecond Laser Micromachining

[in Chinese]1, [in Chinese]1、*, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    The 800 nm, 150 fs, 1 kHz femtosecond laser micromachining for different materials under different processing conditions is studied. The diffraction-limited cutting on the gold and silver films is obtained, respectively. A 4×4 array holes with the diameter of 3 μm are drilled in the GaAs materials. The transmission gratings with the grating constant of 2.5 μm and 5 μm are fabricated into the ZK6 and LaF2 glasses at the machining speed of 400 μm/s.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Applications of Femtosecond Laser Micromachining[J]. Chinese Journal of Lasers, 2006, 33(suppl): 415

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    Paper Information

    Category: laser manufacturing

    Received: --

    Accepted: --

    Published Online: Apr. 21, 2006

    The Author Email: (xyuan@mail.hust.edu.cn)

    DOI:

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