Chinese Journal of Lasers, Volume. 33, Issue suppl, 415(2006)
Applications of Femtosecond Laser Micromachining
The 800 nm, 150 fs, 1 kHz femtosecond laser micromachining for different materials under different processing conditions is studied. The diffraction-limited cutting on the gold and silver films is obtained, respectively. A 4×4 array holes with the diameter of 3 μm are drilled in the GaAs materials. The transmission gratings with the grating constant of 2.5 μm and 5 μm are fabricated into the ZK6 and LaF2 glasses at the machining speed of 400 μm/s.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Applications of Femtosecond Laser Micromachining[J]. Chinese Journal of Lasers, 2006, 33(suppl): 415