Chinese Journal of Lasers, Volume. 39, Issue 7, 708002(2012)
Research on Fringe Shape Recognition Methods Based on Circular Four-Quadrant Photoelectric Detector
For realizing two-dimensional angle measurement, PZT driving method is used to get dynamic interference fringes. According to ideal interference fringes, the relationships of fringe width, orientation angle and each phase of four-quadrant photoelectric detector are deduced with the method of numerical integration, and the approximation points of each quadrant phase are obtained. Moreover, the model between laser beam angle and the fringe shape is established. Ellipse least squares fitting algorithm is used to extract phase information from four quadrants detector. Recognition of width and orientation angle of the fringe is realized. Experimental results of two-dimensional angle measurement indicate that the method meets the requirement of high precision angle measurement. Even with the irregular shape of interference fringes or an inconsistent movement frequency of the worktable, the method can still keep high accuracy and good repeatability.
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Zhou Hao, Wang Xuanze, Zhai Zhongsheng, Yang Liangen, Liu Wenchao. Research on Fringe Shape Recognition Methods Based on Circular Four-Quadrant Photoelectric Detector[J]. Chinese Journal of Lasers, 2012, 39(7): 708002
Category: measurement and metrology
Received: Feb. 5, 2012
Accepted: --
Published Online: Dec. 24, 2012
The Author Email: Hao Zhou (z668182@126.com)