Pulsed CO<sub>2</sub>Laser Assisted Synthesis of Nanometer SiC Ceramic Powder

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 21, Issue 6, 522(1994)

Pulsed CO₂Laser Assisted Synthesis of Nanometer SiC Ceramic Powder

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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Nanometer SiC ceramic powder has been produced by TEA CO2 laser induced SiH4+CH4 plasma chemical reaction. Powder character and property have ben studied through FTIR spectroscopy, X-ray diffraction, elements analysis and transmution electron microscopy technique. In addition, the gas-phase reaction process was discussed with the result of optical emission spetroscopy.

Keywords

SiC powder laser synthesis

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Pulsed CO₂Laser Assisted Synthesis of Nanometer SiC Ceramic Powder[J]. Chinese Journal of Lasers, 1994, 21(6): 522

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Paper Information

Category: laser manufacturing

Received: Jul. 8, 1993

Accepted: --

Published Online: Aug. 17, 2007

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DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology