Laser & Optoelectronics Progress, Volume. 61, Issue 13, 1300011(2024)

Infrared Narrowband Thermal Emitter Utilizing Nanostructures in MEMS and Its Applications

Ruoyu Li1,2, Xiaowei Guo1,2、*, Chi Zhang2, and Shaorong Li2
Author Affiliations
  • 1Yangtze Delta Region Institute (Huzhou), University of Electronic Science and Technology of China, Huzhou 313001, Zhejiang , China
  • 2School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan , China
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    The thermal emission spectrum has found widespread applications in environmental monitoring, astrophysics, medical diagnosis, and drug development. Despite the effectiveness of micro-electro-mechanical system (MEMS)-based infrared emitters in reducing device size, they exhibit drawbacks like a broad spectral distribution range and low emissivity. This paper explores the enhancement of thermal emission characteristics by integrating nanostructures, allowing precise control over spectral features, and effectively improving narrowband emission. The discussion begins with an elucidation of the fundamental principles governing MEMS infrared thermal emission emitters. Subsequently, we delve into the advancements in MEMS infrared narrowband thermal emitters featuring nanostructures such as gratings, photonic crystals, and metasurface structures. The paper further provides a brief overview of the applications of infrared narrowband thermal emitters in gas sensing, thermophotovoltaic power generation, biomedical, and other fields. Finally, a comparative analysis and summary of the performance of nanostructure-based narrowband emitters are presented.

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    Ruoyu Li, Xiaowei Guo, Chi Zhang, Shaorong Li. Infrared Narrowband Thermal Emitter Utilizing Nanostructures in MEMS and Its Applications[J]. Laser & Optoelectronics Progress, 2024, 61(13): 1300011

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    Paper Information

    Category: Reviews

    Received: Oct. 7, 2023

    Accepted: Nov. 27, 2023

    Published Online: Jul. 17, 2024

    The Author Email: Xiaowei Guo (gxw@uestc.edu.cn)

    DOI:10.3788/LOP232224

    CSTR:32186.14.LOP232224

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