Acta Optica Sinica, Volume. 4, Issue 2, 149(1984)
Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon
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CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149
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Category: Instrumentation, Measurement and Metrology
Received: Mar. 9, 1983
Accepted: --
Published Online: Sep. 15, 2011
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