In order to reduce the hysteresis nonlinearity of piezoelectric actuators and improve the positioning accuracy of microsystems, a piezoelectric drive power with the adaptive inverse control is designed in this paper. The signal conditioner, the Boost circuit of the front stage DC-DC and the single-phase full-bridge inverter circuit of the post stage DC-AC were analyzed and designed using the model TMSF320F28335 digital signal processing (DSP) chip. The functions of SPWM drive signal generation, AD sampling of displacement signals, and Prandtl-Ishlinskii adaptive inverse model have been realized by programming under the CCS6.0 software development environment. To validate the adaptive control performance of the designed piezoelectric drive power, the driving control experiments based on the adaptive inverse have carried out with piezoelectric ceramic actuator. The experimental results show that the root mean square error(RMSE) at 1Hz is 3.239 5 μm and the average error of mean absolute error (MAE) is 2.985 1 μm without the control. With the increase of frequency, the maximum values of RMSE and MAE at 20Hz are 21.402 9 μm and 19.306 2 μm, respectively. By using the piezoelectric drive power with the adaptive inverse control, the RMSE is 0.324 9 μm and the MAE is 0.265 6 μm at 1 Hz, and the RMSE is 12.639 μm and the MAE is 11.956 1 μm at 20 Hz.